UltraCoat

UltraCoat systems are ideal for vapor deposition applications that require the highest standards of reliability.

Designed with patented YES technologies, UltraCoat systems offer total control over process and environmental conditions, maximizing wafer coating uniformity.

Independent five-zone temperature control ensures precise uniformity throughout the chamber.

Values

High performance

Coating to 250 °C; chamber pressure 100 mTorr

Process uniformity

≤1.5% temp uniformity with 5-zone temperature control

Customizable configurations

Flexible configurations for automation and chemical delivery

Applications

Anti-stiction layers

Adhesion promotion

Surface modification

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