UltraCoat
General information
UltraCoat systems are ideal for vapor deposition applications that require the highest standards of reliability.
Designed with patented YES technologies, UltraCoat systems offer total control over process and environmental conditions, maximizing wafer coating uniformity.
Independent five-zone temperature control ensures precise uniformity throughout the chamber.
Datasheet & Specs
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Values
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High performance
Coating to 250 °C; chamber pressure 100 mTorr
Process uniformity
≤1.5% temp uniformity with 5-zone temperature control
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Customizable configurations
Flexible configurations for automation and chemical delivery
Applications
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Anti-stiction layers
Adhesion promotion
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Surface modification
Other products
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