EcoCoat

Advanced silane monolayer deposition system supports the broadest application range of organosilanes and substrates.

Three chemical delivery lines for functional organic molecules coating, including alkyl silanes, amino group, epoxy, acrylate, methacrylate compounds, fluorinated compounds, PEG and isocyanate functional silanes.

Handles substrates up to 300 mm with in-situ plasma and heating system up to 205 °C.

Wafers

Runs two wafer sizes in parallel in large batch sizes.

Panels

Handles 510 × 515 mm dimensions down to 200 µm 
thickness without breakage.

Copper Eless

Efficient electroless plating of copper for both surface bonding and glass core liner.

Values

Optimal on-board chemical management

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Specialized handling with panel shock

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High throughput / low COO

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Applications

Glass Etch

Tested on multiple commercially available substrates, the glass core etch can be specified for specific glass needs.

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Applications

ENEPIG / ENIG

Electroless plating processes for enhanced bonding in advanced packaging.

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Applications

Metal Etch

Metal etch capability for Cu, Ti, TiW, Ru, and more.

Values

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Applications

Standard Cleans

Metal etch capability for Cu, Ti, TiW, Ru, and more.

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Applications

Other

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Applications

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Values

Multi-capability system

Integrated multi-capability system enables plasma cleaning, silane coating, and chemical curing.

Broad applications

100+ successful organosilane processes on substrates, including glass, silicon, and organopolymers.

Excellent process control

Precise chemical delivery leads to uniform monolayer deposition and repeatable surface coating.

Applications

Adhesion promotion multi-layer coatings

Anti-stiction coating

Surface modification

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