EcoCoat
General information
Advanced silane monolayer deposition system supports the broadest application range of organosilanes and substrates.
Three chemical delivery lines for functional organic molecules coating, including alkyl silanes, amino group, epoxy, acrylate, methacrylate compounds, fluorinated compounds, PEG and isocyanate functional silanes.
Handles substrates up to 300 mm with in-situ plasma and heating system up to 205 °C.
Datasheet & Specs
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Multi-capability system
Integrated multi-capability system enables plasma cleaning, silane coating, and chemical curing.
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Broad applications
100+ successful organosilane processes on substrates, including glass, silicon, and organopolymers.
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Excellent process control
Precise chemical delivery leads to uniform monolayer deposition and repeatable surface coating.
Applications
Adhesion promotion multi-layer coatings
Anti-stiction coating
Surface modification
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