TersOra

Edge Zone Removal

TersOra is a panel-level advanced packaging system for the removal of metals from the panel edges. It supports low particle contamination and a competitive cost of ownership.

State-of-the-art nozzle technology that etches the edge zone completely with no splashes or scratches to the substrate ensuring high yield and defect control.

Configurable to meet customer needs and works with EFEM and inline systems. Superior particle performance, key for advanced packaging needs.

Wafers

Runs two wafer sizes in parallel in large batch sizes.

Panels

Handles 510 × 515 mm dimensions down to 200 µm 
thickness without breakage.

Copper Eless

Efficient electroless plating of copper for both surface bonding and glass core liner.

Values

Optimal on-board chemical management

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Specialized handling with panel shock

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High throughput / low COO

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Applications

Glass Etch

Tested on multiple commercially available substrates, the glass core etch can be specified for specific glass needs.

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Applications

ENEPIG / ENIG

Electroless plating processes for enhanced bonding in advanced packaging.

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Applications

Metal Etch

Metal etch capability for Cu, Ti, TiW, Ru, and more.

Values

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Applications

Standard Cleans

Metal etch capability for Cu, Ti, TiW, Ru, and more.

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Applications

Other

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Applications

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Values

Low COO

Superior COO due to high throughput per footprint with efficient chemistry utilization.

Single-panel system

Single system to etch both top and bottom sides of the panel with no cleaning step needed.

System configurable

Configurable to meet customer needs, and works with EFEM and inline systems.

Applications

CCL substrates

Metal (Ti, Cu) edge removal

Glass core and carrier substrates

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